JPS624888B2 - - Google Patents

Info

Publication number
JPS624888B2
JPS624888B2 JP51160055A JP16005576A JPS624888B2 JP S624888 B2 JPS624888 B2 JP S624888B2 JP 51160055 A JP51160055 A JP 51160055A JP 16005576 A JP16005576 A JP 16005576A JP S624888 B2 JPS624888 B2 JP S624888B2
Authority
JP
Japan
Prior art keywords
crystal resonator
electrode
tuning fork
base
mask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP51160055A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5386190A (en
Inventor
Makoto Wakasugi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Citizen Watch Co Ltd
Original Assignee
Citizen Watch Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Citizen Watch Co Ltd filed Critical Citizen Watch Co Ltd
Priority to JP16005576A priority Critical patent/JPS5386190A/ja
Priority to US05/864,271 priority patent/US4252839A/en
Priority to GB54107/77A priority patent/GB1594980A/en
Publication of JPS5386190A publication Critical patent/JPS5386190A/ja
Publication of JPS624888B2 publication Critical patent/JPS624888B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/21Crystal tuning forks
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04Coating on selected surface areas, e.g. using masks
    • C23C14/042Coating on selected surface areas, e.g. using masks using masks

Landscapes

  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Physical Vapour Deposition (AREA)
JP16005576A 1976-12-29 1976-12-29 Electrode structure of tuning fork type crystal vibrator and its formationmethod Granted JPS5386190A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP16005576A JPS5386190A (en) 1976-12-29 1976-12-29 Electrode structure of tuning fork type crystal vibrator and its formationmethod
US05/864,271 US4252839A (en) 1976-12-29 1977-12-27 Tuning fork-type quartz crystal vibrator and method of forming the same
GB54107/77A GB1594980A (en) 1976-12-29 1977-12-29 Tuning fork-type quartz crystal vibrator and method of forming the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16005576A JPS5386190A (en) 1976-12-29 1976-12-29 Electrode structure of tuning fork type crystal vibrator and its formationmethod

Publications (2)

Publication Number Publication Date
JPS5386190A JPS5386190A (en) 1978-07-29
JPS624888B2 true JPS624888B2 (en]) 1987-02-02

Family

ID=15706921

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16005576A Granted JPS5386190A (en) 1976-12-29 1976-12-29 Electrode structure of tuning fork type crystal vibrator and its formationmethod

Country Status (1)

Country Link
JP (1) JPS5386190A (en])

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01318543A (ja) * 1988-06-17 1989-12-25 Sony Tektronix Corp 直流・直流変換型電源回路
WO2005008888A1 (ja) * 2003-07-22 2005-01-27 Daishinku Corporation 音叉型振動片、音叉型振動子、および音叉型振動片の製造方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4843287A (en]) * 1971-10-01 1973-06-22
JPS50120977A (en]) * 1974-03-12 1975-09-22
JPS50128489A (en]) * 1974-03-28 1975-10-09
JPS51111095A (en) * 1975-03-26 1976-10-01 Seiko Instr & Electronics Ltd Piezo-electrical vibrator

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01318543A (ja) * 1988-06-17 1989-12-25 Sony Tektronix Corp 直流・直流変換型電源回路
WO2005008888A1 (ja) * 2003-07-22 2005-01-27 Daishinku Corporation 音叉型振動片、音叉型振動子、および音叉型振動片の製造方法

Also Published As

Publication number Publication date
JPS5386190A (en) 1978-07-29

Similar Documents

Publication Publication Date Title
JP3475928B2 (ja) 圧電振動子およびその製造方法
JP2004007428A (ja) 音叉型圧電振動片及びその製造方法、圧電デバイス
JP5085681B2 (ja) 圧電振動片、圧電デバイスおよび圧電振動片の製造方法
JP5520618B2 (ja) 音叉型屈曲水晶振動素子
JP3844213B2 (ja) 圧電振動片の製造方法、フォトマスク、圧電振動片および圧電デバイス
JP5251955B2 (ja) 振動片の加工方法
WO2005008888A1 (ja) 音叉型振動片、音叉型振動子、および音叉型振動片の製造方法
JP2011217040A (ja) 音叉型水晶片の製造方法
JP3952811B2 (ja) 圧電振動片、圧電振動片の製造方法および圧電デバイス
EP0459631B1 (en) AT-cut crystal oscillating element and method of making the same
JPS624888B2 (en])
JP2009152988A (ja) 圧電振動片、圧電デバイス及びそれらの製造方法
JP2004364019A (ja) 圧電振動片、圧電振動子、圧電発振器、ジャイロスコープセンサ、電子機器、及び製造方法
JP2008085631A (ja) 振動片の製造方法、振動片、および振動子
JP5465572B2 (ja) 音叉型水晶片の製造方法
JP2005020141A (ja) 圧電振動片の製造方法及び圧電デバイスの製造方法
JP4060699B2 (ja) 水晶振動子の製造方法
JP5465041B2 (ja) 音叉型屈曲水晶振動素子
JP2001144581A (ja) 圧電振動子およびその製造方法
JP2014023134A (ja) 音叉型屈曲水晶振動素子及びその製造方法
JP2005039780A (ja) 圧電振動片、圧電振動片の製造方法、圧電振動子および振動型ジャイロスコープ、圧電振動子および振動型ジャイロスコープの製造方法
JP2011223228A (ja) 振動片、振動子及び発振器
JP5353758B2 (ja) 振動型ジャイロスコープの製造方法
JP3734127B2 (ja) 圧電振動子及び圧電発振器とこれに用いる圧電振動素子の製造方法
JPS5821965B2 (ja) 音叉型圧電振動子の側面電極形成方法